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With the development of aerospace, instrumentation, medical devices and other fields, the fabrication of high quality microholes with large depth to diameter ratio in high strength and high hardness materials, such as titanium alloys has become an urgent problem to be solved. Ti-6 Al-4V alloy has the advantages of light weight, high hardness, and good stability, and is widely used in aviation field. Current drilling technologies mainly include mechanical drilling, electrochemical machining(ECM), electric discharge machining(EDM), etc., but these traditional processing methods suffer from low efficiency. Affected by tool hardness and residual electrolyte, the quality of processed microholes is relatively low. And the traditional drilling method cannot meet the requirements of processing small diameter microholes on high hardness materials, while laser drilling technology can solve such problems with high processing efficiency. However, in the process of femtosecond laser processing of microholes, due to the heat transfer in the workpiece material, the material near the laser irradiation area will be rapidly solidified after melting. With the increase of the depth of microhole processing, molten material splashes under the recoil pressure of the material steam, and part of the splash material attaches to the hole wall and re-solidifies to form a recast layer, and a little splash will be deposited around the hole. The formation of debris, burrs and other defects affect the surface morphology of microholes. Uneven ablation and deposited debris during drilling process tend to cause roughness of the hole inner wall and increased surface roughness. Moreover, residual stress generated during rapid cooling and solidification process easily lead to the formation of micro-cracks. Ultrasonic vibration can promote ablative debris discharge by enhancing air convection in the machining area, which is conducive to reduce the formation of recast layer, increase the depth of microholes, and improve the quality of laser machining microholes. Combining ultrasonic vibration with femtosecond laser, the manufacturing efficiency, depth to diameter ratio and morphology characteristics of microholes in laser processing can be further improved. In this paper, Ti-6 Al-4V alloy material was used as the experimental material, ultrasonic vibration was combined with femtosecond laser, and an ultrasonic vibration assisted femtosecond laser composite processing method was proposed. Based on multi-pulse laser hole making and circumferential femtosecond laser hole making, the influence of ultrasonic vibration on the morphology and size of microholes was studied. The main research contents and achievements were as follows: 1) Multi-pulse drilling experiments were carried out on Ti-6 Al-4V alloy material by ultrasonic vibration and laser composite processing. The effects of pulse energy density(2.65, 3.53, 7.07, 10.6, and 14.1 J·cm-2) and pulse number(100, 200, 500, 1000, 2000) on microhole diameter, roundness and taper were investigated. The experimental results showed that with or without ultrasonic vibration, the microhole diameter increased with the increase of pulse energy density, and the microhole diameter is larger when ultrasonic vibration was assisted. With the increase of energy density, the roundness of microholes gradually increased, and the microholes gradually approached to the circle. Ultrasonic vibration could improve the roundness of microholes well. At the selected energy density, the taper of microhole was reduced from 3.52 to 2.65, showing a significant improvement. At the same energy density, ultrasonic assistance could slightly reduce the microhole taper. When microholes were processed under different laser pulse numbers, ultrasonic assistance could effectively improve the roundness of microholes, and increase the depth of microholes. The bottom morphology of ultrasonic vibration assisted microholes was better than that of traditional femtosecond laser drilling. The depth of microhole processing under ultrasonic vibration assisted microholes was also significantly improved, and the micro-cracks generated on the inner wall of microholes during pulse drilling were also improved. 2) Single factor experimental study of ultrasonic vibration and laser combined ring cutting perforation was carried out. The influences of laser power(100, 150, 200, 400, and 600 mW), scanning speed(0.1, 0.5, and 1 mm·s-1), scanning times(1, 5, 15) and ultrasonic power(0, 100, 300, 500, 700, and 900 W) on quality characteristics including microhole diameter, roundness and taper were analyzed. The experimental results showed that ultrasonic vibration could effectively increase the depth of microholes and improve roundness deviation and taper of microholes, but excessive ultrasonic power would increase the roundness deviation of microholes. The roundness of microhole deteriorated with increasing laser power, while it improved with increasing scanning speed. When the scanning speed was lower, the overall taper of the microhole was better and the wall was smoother. The more scanning times, the more materials removed during laser processing, the more ablative crater would appear on the surface of the material due to ablation, and the surface would be in a state of excessive ablation, which would affect the profile of the microhole. Under the same scanning times, roundness of the microhole would be improved. During machining process, higher ultrasonic power promoted the local heat convection and improved heat transfer efficiency. With the increase of ultrasonic power per unit area, the roundness deviation of the microhole showed an increasing trend.
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Basic Information:
DOI：10.13373/j.cnki.cjrm.XY25010006
China Classification Code:TG66;TG146.23
Citation Information:
[1]Huang Xinwei,Ma Yuping,Wu Xiaolong.Regularity of Femtosecond Laser Processing of Microholes in Ti-6Al-4V Alloy with Ultrasound Assistance[J].Chinese Journal of Rare Metals,2026,50(06):885-896.DOI:10.13373/j.cnki.cjrm.XY25010006.
Fund Information:
安徽省自然科学基金项目（1908085ME129,1908085ME130）资助
2026-06-15
2026-06-15